Max Stelzer to present at IEDM 2018 in San Francisco

IEEE International Electron Devices Meeting (IEDM) is the world’s preeminent forum for reporting technological breakthroughs in the areas of semiconductor and electronic device technology, design, manufacturing, physics, and modeling. IEDM is the flagship conference for nanometer-scale CMOS transistor technology, advanced memory, displays, sensors, MEMS devices, novel quantum and nano-scale devices and phenomenology, optoelectronics, devices for power and energy harvesting, high-speed devices, as well as process technology and device modeling and simulation.

We present at IEDM 2018 in San Francisco a method to deposit graphenic carbon at low temperature by a modified sputter process. It enables record performance in terms of reliability compared to the standard TiSi-contact.

Please join us to the talk of the paper: "11.2 Low Temperature Sputtered Graphenic Carbon Enables Highly Reliable Contacts to Silicon". Why fiddeling around with graphene, if you can deposit it with sputtering? #carbon #reliability #graphene #IEDM