Great news. The company ASM reported on its investor day new opportunities
with carbon fill by PECVD deposited carbon. The temperature for deposition is not released.
It is unknow, whether it is conductive or insulating.
Source: page 10 in this presentation:
https://investorday.asm.com/app/uploads/2025/09/asm_investor_day_2025.pdf
A possible recipe is disclosed by a patent from Applied Materials:
https://patents.google.com/patent/US9514932B2/en
https://patents.google.com/patent/US20190333760A1/en
ASM reported PECVD fill with flowable carbon
