Lectures and Labs

Modeling of microstructures, microdevices and microsystems 1

Lecturer (assistant)
  • Gabriele Schrag [L]
  • Gerhard Wachutka
Duration3 SWS
TermWintersemester 2023/24
DatesSee TUMonline


Application-oriented introduction to the physically-based modeling of microdevices and microsystems. The main focus is on energy conversions and energy-coupled effects, which constitute the basis for the behaviour of microstructured electronic devices as well as microminiaturized sensors and actuators. The intention of this course is to provide the basic concepts for the modeling and numerical simulation of the operation of microdevices and microsystems: - Introduction to physically-based modeling - Basic concepts of statistical mechanics and phenomenological thermodynamics - Phenomenological transport theory (Onsager formalism).