Design and Simulation of Microelectromechanical Systems (MEMS)


With the commercially available system simulation software Coventor MEMS+, simulation models of various micromechanical sensors and actuators are created from basic elements and their operating behavior is investigated. The created models can be combined with MATLAB/Simulink, so that the overall system behavior including electrical circuitry and control can be analyzed. The practical tasks are performed in groups of two.

The focus of the accompanying lecture will be set on basic knowledge of the simulation of microelectromechanical devices and systems (MEMS). Different methods for system simulation will be introduced, an overview of common approaches and currently available software tools will be given, and challenges and basic physical problems to be solved in the simulation of MEMS will be discussed. In addition, basic physical knowledge required for the simulation of MEMS will be taught.


minimum 4 (2 groups of two participants) to maximum 14 (7 groups of two participants).


Room N2159, Building N1, 2. OG.


To familiarize yourself with the topics of the laboratory, we recommend the literature listed in the module description and the lecture section. Furthermore, handouts of the topics covered in the lecture part are provided together with a script containing the simulations tasks. The practical course introduces the commercial software Coventor MEMS+. Furthermore, electronic tutorials and manuals are available.


The examination consists of a 30 minute oral examination and the submission of independently prepared practical reports in which the simulation tasks, results and evaluation are described and discussed. Each group has to submit one report. The reports must be handed in no later than 7 days before the oral exam. One third of the overall mark is given to the documentation and elaboration. Two third of the overall mark are given to the oral exam.


The prerequisite for admission to the exam is the regular participation to the laboratory. Reasons for absence must be reported in time, missed appointments must usually be made up for. If you cannot attend a laboratory appointment, e.g. due to illness, please let us know. This is also in the interest of your laboratory partner.