Virtual prototyping for and design and characterization of microstructured electronic and micromechatronic devices and systems – physics-based modeling methodologies

The research activities of the Professorship of Microsensors and Actuators (MSA) focus on microstructured electronic and micromechatronic devices and systems employed in various application fields. We concentrate on physics-based modeling, numerical simulation, virtual prototyping, characterization and diagnostics of device operation and system performance.

The main areas of interest are micromechatronical sensors, actuators, and systems as well as power semiconductor devices. TEP offers expertise in physics-based modeling of energy-coupled problems on device- and system-level, parameter extraction, model calibration and verification, design and characterization of teststructures and prototypes. Key facilities include state-of-the-art TCAD tools for design, simulation and optimization of power devices and micro­systems, measurement setups for power devices, optical and electrical characterization equipment for the static and dynamic characterization of MEMS.

Ongoing projects lie in the field of:

  • Modeling methodologies for microstructured power devices, sensors, actuators, and microsystems and multi-energy domain-coupled problem
  • Virtual prototyping of microsystems and power modules
  • Reliability and robustness assessment of high power devices and micromechatronic components
  • Experimental characterization, model validation, and parameter extraction for MEMS, NEMS, and semiconductor power devices