Piezoelectric membrane-based MEMS transducers

Over the last years, there has been a steady demand growth for high-quality small-sized acoustic transducers. Such devices find application in consumer electronic products like smartphones and tablets but also in personal assistants and domestic applications.

Within this project, we develop different membrane-based transducers concepts based on thin-film piezoelectric materials (see Figure 1). The project consists of different tasks: the definition of the design of the devices with the help of computer simulation, the realization of the devices and the final characterization. We investigate different aspects of the realized component to extract information about material properties, device performance and system-level behavior. Furthermore, we investigate the possibility to perform device-level and system-level optimization for specific target applications.