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Publication in the Journal of Vacuum Science & Technology B
This paper introduces the new simulation tool ContaminationFlow, which models the spread of contaminants in vacuum environments using a test-particle Monte Carlo (TPMC) simulation and is particularly well suited to applications in the aerospace and semiconductor industries.
The scientific article is available at:
https://doi.org/10.1116/6.0005355
DOI: 10.1116/6.0005355